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- 91163552 contributor B6489195.
- 91163552 created "c1990.".
- 91163552 date "1990".
- 91163552 date "c1990.".
- 91163552 dateCopyrighted "c1990.".
- 91163552 description "Includes bibliographical references.".
- 91163552 extent "1 v. (various pagings) :".
- 91163552 issued "1990".
- 91163552 issued "c1990.".
- 91163552 language "eng".
- 91163552 publisher "Dearborn, Mich. (1 SME Dr., Dearborn) : Society of Manufacturing Engineers,".
- 91163552 subject "621.381/52 20".
- 91163552 subject "Electronic industries Congresses.".
- 91163552 subject "Semiconductors Design and construction Congresses.".
- 91163552 subject "TK7836 .S44 1990".
- 91163552 title "Semiconductor manufacturing : building a competive [sic] edge for the 90s : October 30-November 1, 1990, Tempe, Arizona.".
- 91163552 type "text".