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- 91187558 contributor B6514699.
- 91187558 created "1990.".
- 91187558 date "1990".
- 91187558 date "1990.".
- 91187558 dateCopyrighted "1990.".
- 91187558 description "Includes bibliographical references.".
- 91187558 extent "527 p. :".
- 91187558 identifier "5020143812 :".
- 91187558 issued "1990".
- 91187558 issued "1990.".
- 91187558 language "rus".
- 91187558 subject "Integrated circuits Design and construction.".
- 91187558 subject "Lithography.".
- 91187558 subject "TK7874 .V333 1990".
- 91187558 title "Fizika submikronnoĭ litografii / K.A. Valiev.".
- 91187558 type "text".