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- 92028941 contributor B6645020.
- 92028941 contributor B6645021.
- 92028941 created "c1992.".
- 92028941 date "1992".
- 92028941 date "c1992.".
- 92028941 dateCopyrighted "c1992.".
- 92028941 description "Includes bibliographical references and indexes.".
- 92028941 extent "xix, 650 p. :".
- 92028941 identifier "0306441462".
- 92028941 identifier 92028941-d.html.
- 92028941 identifier 92028941-t.html.
- 92028941 isPartOf "Microdevices".
- 92028941 issued "1992".
- 92028941 issued "c1992.".
- 92028941 language "eng".
- 92028941 publisher "New York : Plenum Press,".
- 92028941 subject "621.381 20".
- 92028941 subject "Microelectronics.".
- 92028941 subject "TK7874 .B725 1992".
- 92028941 subject "Thin-film circuits.".
- 92028941 title "The physics of micro/nano-fabrication / Ivor Brodie and Julius J. Muray.".
- 92028941 type "text".