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- 92033603 contributor B6650269.
- 92033603 created "c1993.".
- 92033603 date "1993".
- 92033603 date "c1993.".
- 92033603 dateCopyrighted "c1993.".
- 92033603 description "Includes bibliographical references and index.".
- 92033603 extent "vi, 250 p. :".
- 92033603 identifier "0750690011 (acid-free paper)".
- 92033603 issued "1993".
- 92033603 issued "c1993.".
- 92033603 language "eng".
- 92033603 publisher "Boston Butterworth-Heinemann,".
- 92033603 subject "621.39/5 20".
- 92033603 subject "Integrated circuits Very large scale integration.".
- 92033603 subject "Metallizing.".
- 92033603 subject "TK7874 .M868 1993".
- 92033603 title "Metallization : theory and practice for VLSI and ULSI / Shyam P. Murarka.".
- 92033603 type "text".