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- 92042556 contributor B6660766.
- 92042556 contributor B6660767.
- 92042556 created "1993.".
- 92042556 date "1993".
- 92042556 date "1993.".
- 92042556 dateCopyrighted "1993.".
- 92042556 description "Includes bibliographical references.".
- 92042556 extent "x, 162 p. :".
- 92042556 identifier "0444899154 (alk. paper)".
- 92042556 isPartOf "European Materials Research Society symposia proceedings ; v. 37".
- 92042556 issued "1993".
- 92042556 issued "1993.".
- 92042556 language "eng".
- 92042556 publisher "Amsterdam ; New York : North-Holland,".
- 92042556 subject "621.3815 20".
- 92042556 subject "Semiconductors Design and construction Congresses.".
- 92042556 subject "TK7871.85 .E87 1992".
- 92042556 subject "Vacuum technology Congresses.".
- 92042556 title "Single chamber processing : proceedings of the joint session on single chamber processing : requirements and challenges of the 1992 E-MRS Spring Meeting Conference, Strasbourg, France, June 2-5, 1992 / edited by Yves I. Nissim, Avishay Katz.".
- 92042556 type "text".