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- 92060205 contributor B6672461.
- 92060205 created "1992.".
- 92060205 date "1992".
- 92060205 date "1992.".
- 92060205 dateCopyrighted "1992.".
- 92060205 description "Includes bibliographical references.".
- 92060205 extent "xii, 89 p. :".
- 92060205 identifier "0309046351".
- 92060205 issued "1992".
- 92060205 issued "1992.".
- 92060205 language "eng".
- 92060205 publisher "Washington, D.C. : National Academy Press,".
- 92060205 subject "621.381 20".
- 92060205 subject "Microelectronics Materials.".
- 92060205 subject "Microelectronics industry.".
- 92060205 subject "Molecular beams Industrial applications.".
- 92060205 subject "Plasma-enhanced chemical vapor deposition Industrial applications.".
- 92060205 subject "TK7836 .N37 1992".
- 92060205 title "Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.".
- 92060205 type "text".