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- 92070529 alternative "Automated integrated circuits manufacturing.".
- 92070529 contributor B6675962.
- 92070529 contributor B6675963.
- 92070529 contributor B6675964.
- 92070529 created "c1992.".
- 92070529 date "1992".
- 92070529 date "c1992.".
- 92070529 dateCopyrighted "c1992.".
- 92070529 description "Includes bibliographical references and indexes.".
- 92070529 extent "ix, 283 p. :".
- 92070529 identifier "1566770041".
- 92070529 isPartOf "Proceedings (Electrochemical Society) ; v. 92-8.".
- 92070529 isPartOf "Proceedings / the Electrochemical Society ; v. 92-8".
- 92070529 issued "1992".
- 92070529 issued "c1992.".
- 92070529 language "eng".
- 92070529 publisher "Pennington, NJ : Electrochemical Society,".
- 92070529 subject "621.3815 20".
- 92070529 subject "Electronic industries Automation congresses.".
- 92070529 subject "Integrated circuits Design and construction Data processing Congresses.".
- 92070529 subject "Semiconductors Design and construction Data processing Congresses.".
- 92070529 subject "TK7874 .S884 1991".
- 92070529 title "Proceedings of the Seventh Symposium on Automated Integrated Circuits Manufacturing / edited by Vaughn E. Akins, Hiroyuki Harada.".
- 92070529 type "text".