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- 92071002 alternative "Interconnection and contact metallization for ULSI.".
- 92071002 alternative "Patterning science and technology II.".
- 92071002 alternative "Patterning science and technology and interconnection and contact metallization for ULSI.".
- 92071002 contributor B6676399.
- 92071002 contributor B6676400.
- 92071002 contributor B6676401.
- 92071002 contributor B6676402.
- 92071002 created "c1992.".
- 92071002 date "1992".
- 92071002 date "c1992.".
- 92071002 dateCopyrighted "c1992.".
- 92071002 description "Includes bibliographical references and index.".
- 92071002 extent "x, 382 p. :".
- 92071002 identifier "1566770076".
- 92071002 isPartOf "Proceedings (Electrochemical Society) ; v. 92-6.".
- 92071002 isPartOf "Proceedings / Electrochemical Society ; v. 92-6".
- 92071002 issued "1992".
- 92071002 issued "c1992.".
- 92071002 language "eng".
- 92071002 publisher "Pennington, NJ : Electrochemical Society,".
- 92071002 subject "Integrated circuits Ultra large scale integration Design and construction Congresses.".
- 92071002 subject "Lithography Congresses.".
- 92071002 subject "Metallizing Congresses.".
- 92071002 subject "Microelectronic packaging Congresses.".
- 92071002 subject "TK7874 .S943 1991".
- 92071002 title "Proceedings of the symposia on Patterning Science and Technology II [and] Interconnection and Contact Metallization for ULSI / edited by Wayne Greene ... [et al. ; sponsored by the] Dielectric Science and Technology and Electronics divisions.".
- 92071002 type "text".