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- 92080102 contributor B6680983.
- 92080102 contributor B6680984.
- 92080102 created "c1992.".
- 92080102 date "1992".
- 92080102 date "c1992.".
- 92080102 dateCopyrighted "c1992.".
- 92080102 description "Includes bibliographical references and index.".
- 92080102 extent "ix, 369 p. :".
- 92080102 identifier "0819407577".
- 92080102 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 1619".
- 92080102 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 1619.".
- 92080102 issued "1992".
- 92080102 issued "c1992.".
- 92080102 language "eng".
- 92080102 publisher "Bellingham, Wash. : SPIE,".
- 92080102 subject "621.381 20".
- 92080102 subject "Optical instruments Vibration Congresses.".
- 92080102 subject "QC370.5 .V53 1992".
- 92080102 subject "Vibration Measurement Congresses.".
- 92080102 title "Vibration control in microelectronics, optics, and metrology : 4-6 November 1991, San Jose, California / Colin G. Gordon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 92080102 type "text".