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- 92080614 contributor B6681385.
- 92080614 contributor B6681386.
- 92080614 created "c1992.".
- 92080614 date "1992".
- 92080614 date "c1992.".
- 92080614 dateCopyrighted "c1992.".
- 92080614 description "Includes bibliographical references and index.".
- 92080614 extent "ix, 153 p. :".
- 92080614 identifier "1557522308".
- 92080614 isPartOf "1992 technical digest series ; v. 8".
- 92080614 isPartOf "Technical digest series (Optical Society of America) ; 1992, v. 8.".
- 92080614 issued "1992".
- 92080614 issued "c1992.".
- 92080614 language "eng".
- 92080614 publisher "Washington, DC : The Society,".
- 92080614 subject "621.3815/31 20".
- 92080614 subject "TK7874 .S646 1992".
- 92080614 subject "X-ray lithography Congresses.".
- 92080614 title "Soft-x-ray projection lithography : summaries of papers presented at the Soft-X-ray Projection Lithography Topical Meeting, April 6-8, 1992, Monterey, California / sponsored by Air Force Office of Scientific Research, Defense Advanced Research Projects Agency, National Science Foundation for the Optical Society of America.".
- 92080614 type "text".