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- 93004078 contributor B6894340.
- 93004078 created "c1993.".
- 93004078 date "1993".
- 93004078 date "c1993.".
- 93004078 dateCopyrighted "c1993.".
- 93004078 description "Includes bibliographical references and index.".
- 93004078 extent "xx, 623 p. :".
- 93004078 identifier "0815513313".
- 93004078 identifier 93004078.html.
- 93004078 isPartOf "Materials science and process technology series. Electronic materials and process technology".
- 93004078 issued "1993".
- 93004078 issued "c1993.".
- 93004078 language "eng".
- 93004078 publisher "Park Ridge, N.J., U.S.A. : Noyes Publications,".
- 93004078 subject "621.3815/2 20".
- 93004078 subject "Semiconductor wafers Cleaning.".
- 93004078 subject "TK7871.85 .H335 1993".
- 93004078 title "Handbook of semiconductor wafer cleaning technology : science, technology, and applications / edited by Werner Kern.".
- 93004078 type "text".