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- 93018931 contributor B6911981.
- 93018931 contributor B6911982.
- 93018931 created "c1993.".
- 93018931 date "1993".
- 93018931 date "c1993.".
- 93018931 dateCopyrighted "c1993.".
- 93018931 description "Includes bibliographical references (p. 243-316) and index.".
- 93018931 extent "xiv, 327 p. :".
- 93018931 identifier "0824791460 (acid-free paper)".
- 93018931 identifier 93018931-d.html.
- 93018931 isPartOf "Applied physics ; 1".
- 93018931 isPartOf "Applied physics series (Marcel Dekker, Inc.) ; 1.".
- 93018931 issued "1993".
- 93018931 issued "c1993.".
- 93018931 language "eng".
- 93018931 publisher "New York : M. Dekker,".
- 93018931 subject "621.3815/2 20".
- 93018931 subject "Plasma-enhanced chemical vapor deposition.".
- 93018931 subject "Silicon alloys.".
- 93018931 subject "TK7872.T55 L84 1993".
- 93018931 subject "Thin film devices Design and construction.".
- 93018931 subject "Thin films Electric properties.".
- 93018931 subject "Thin films Optical properties.".
- 93018931 title "Hydrogenated amorphous silicon alloy deposition processes / Werner Luft, Y. Simon Tsuo.".
- 93018931 type "text".