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- 93020488 contributor B6913873.
- 93020488 contributor B6913874.
- 93020488 contributor B6913875.
- 93020488 created "c1993.".
- 93020488 date "1993".
- 93020488 date "c1993.".
- 93020488 dateCopyrighted "c1993.".
- 93020488 description "Includes bibliographical references and index.".
- 93020488 extent "xv, 633 p. :".
- 93020488 identifier "0792322657 (acid-free paper)".
- 93020488 identifier 93020488-d.html.
- 93020488 isPartOf "NATO ASI series. Series E, Applied sciences ; no. 234.".
- 93020488 isPartOf "NATO ASI series. Series E, Applied sciences ; vol. 234".
- 93020488 issued "1993".
- 93020488 issued "c1993.".
- 93020488 language "eng".
- 93020488 publisher "Dordrecht ; Boston : Kluwer Academic,".
- 93020488 subject "621.3815 20".
- 93020488 subject "TK7872.T55 N38 1993".
- 93020488 subject "Thin film devices Congresses.".
- 93020488 subject "Thin films Congresses.".
- 93020488 title "Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices / edited by Orlando Auciello and Jürgen Engemann.".
- 93020488 type "text".