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- 93022784 contributor B6916261.
- 93022784 created "c1993.".
- 93022784 date "1993".
- 93022784 date "c1993.".
- 93022784 dateCopyrighted "c1993.".
- 93022784 description "Includes bibliographical references and index.".
- 93022784 extent "xiii, 240 p. :".
- 93022784 identifier "0750691727".
- 93022784 isPartOf "Materials characterization series".
- 93022784 issued "1993".
- 93022784 issued "c1993.".
- 93022784 language "eng".
- 93022784 publisher "Boston : Butterworth-Heinemann ; Greenwich : Manning,".
- 93022784 subject "620.1/93 20".
- 93022784 subject "Electric conductors.".
- 93022784 subject "QC611.8.S5 C48 1993".
- 93022784 subject "Semiconductor films.".
- 93022784 subject "Silicon.".
- 93022784 subject "Surface chemistry.".
- 93022784 title "Characterization in silicon processing / editor, Yale Strusser ; contributing editors, C.R. Brundle, Gary E. McGuire ; managing editor, Lee E. Fitzpatrick.".
- 93022784 type "text".