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- 93028784 contributor B6923300.
- 93028784 contributor B6923301.
- 93028784 created "c1993.".
- 93028784 date "1993".
- 93028784 date "c1993.".
- 93028784 dateCopyrighted "c1993.".
- 93028784 description "Includes bibliographical references and index.".
- 93028784 extent "xi, 518 p. :".
- 93028784 identifier "1558992138".
- 93028784 isPartOf "Materials Research Society symposia proceedings ; v. 315.".
- 93028784 isPartOf "Materials Research Society symposium proceedings ; v. 315".
- 93028784 issued "1993".
- 93028784 issued "c1993.".
- 93028784 language "eng".
- 93028784 publisher "Pittsburgh, PA : Materials Research Society,".
- 93028784 subject "621.3815/2 20".
- 93028784 subject "Semiconductors Cleaning Congresses.".
- 93028784 subject "Semiconductors Design and construction Congresses.".
- 93028784 subject "Surface chemistry Congresses.".
- 93028784 subject "Surface preparation Congresses.".
- 93028784 subject "TK7871.85 .S9155 1993".
- 93028784 title "Surface chemical cleaning and passivation for semiconductor processing : symposium held April 13-15, 1993, San Francisco, California, U.S.A. / editors, Gregg S. Higashi, Eugene A. Irene, Tadahiro Ohmi.".
- 93028784 type "text".