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- 93033955 contributor B6929179.
- 93033955 contributor B6929180.
- 93033955 created "1994.".
- 93033955 date "1994".
- 93033955 date "1994.".
- 93033955 dateCopyrighted "1994.".
- 93033955 description "Includes bibliographical references and indexes.".
- 93033955 extent "xii, 571 p. :".
- 93033955 identifier "0841227217 (alk. paper)".
- 93033955 identifier 93033955-d.html.
- 93033955 identifier 93033955-t.html.
- 93033955 isPartOf "ACS symposium series, 0097-6156 ; 537".
- 93033955 issued "1994".
- 93033955 issued "1994.".
- 93033955 language "eng".
- 93033955 publisher "Washington, DC : American Chemical Society,".
- 93033955 subject "621.3815/31 20".
- 93033955 subject "Microelectronics Materials Congresses.".
- 93033955 subject "Polymers Congresses.".
- 93033955 subject "TK7871.15.P6 P628 1994".
- 93033955 title "Polymers for microelectronics : resists and dielectrics / Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor.".
- 93033955 type "text".