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- 93034352 contributor B6929647.
- 93034352 contributor B6929648.
- 93034352 created "1993.".
- 93034352 date "1993".
- 93034352 date "1993.".
- 93034352 dateCopyrighted "1993.".
- 93034352 description "Includes bibliographical references and indexes.".
- 93034352 extent "xi, 291 p. :".
- 93034352 identifier "1558992022".
- 93034352 isPartOf "Materials Research Society symposia proceedings ; v. 306.".
- 93034352 isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 306".
- 93034352 issued "1993".
- 93034352 issued "1993.".
- 93034352 language "eng".
- 93034352 publisher "Pittsburgh, Pa. : Materials Research Society,".
- 93034352 subject "621.3815/31 20".
- 93034352 subject "TK7874 .M342 1993".
- 93034352 subject "X-ray lithography Congresses.".
- 93034352 title "Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A. / editors, George K. Celler, Juan R. Maldonado.".
- 93034352 type "text".