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- 93042023 contributor B6938267.
- 93042023 created "1994.".
- 93042023 date "1994".
- 93042023 date "1994.".
- 93042023 dateCopyrighted "1994.".
- 93042023 description "An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil.".
- 93042023 description "Includes bibliographical references and index.".
- 93042023 extent "xiv, 527 p. :".
- 93042023 identifier "0841228485 (alk. paper)".
- 93042023 identifier 93042023-d.html.
- 93042023 identifier 93042023-t.html.
- 93042023 isPartOf "ACS professional reference book".
- 93042023 issued "1994".
- 93042023 issued "1994.".
- 93042023 language "eng".
- 93042023 publisher "Washington, DC : American Chemical Society,".
- 93042023 subject "621.3815/31 20".
- 93042023 subject "Microlithography Congresses.".
- 93042023 subject "Photoresists Congresses.".
- 93042023 subject "Plasma etching Congresses.".
- 93042023 subject "Semiconductors Etching Congresses.".
- 93042023 subject "TR940 .I57 1994".
- 93042023 tableOfContents "An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil.".
- 93042023 title "Introduction to microlithography / edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden.".
- 93042023 type "text".