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- 93042135 contributor B6938384.
- 93042135 created "c1994.".
- 93042135 date "1994".
- 93042135 date "c1994.".
- 93042135 dateCopyrighted "c1994.".
- 93042135 description "Includes bibliographical references and index.".
- 93042135 extent "xiii, 257 p. :".
- 93042135 identifier "0780310551".
- 93042135 issued "1994".
- 93042135 issued "c1994.".
- 93042135 language "eng".
- 93042135 publisher "Piscataway, NJ : IEEE Press ; New York : Institute of Electrical and Electronics Engineers,".
- 93042135 subject "621.044 20".
- 93042135 subject "Low temperature plasmas.".
- 93042135 subject "Manufacturing processes.".
- 93042135 subject "Plasma engineering.".
- 93042135 subject "TA2020 .G75 1994".
- 93042135 title "Cold plasma in materials fabrication : from fundamentals to applications / Alfred Grill.".
- 93042135 type "text".