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- 93070053 alternative "Process physics and modeling in semiconductor technology.".
- 93070053 contributor B6949269.
- 93070053 contributor B6949270.
- 93070053 contributor B6949271.
- 93070053 created "c1993.".
- 93070053 date "1993".
- 93070053 date "c1993.".
- 93070053 dateCopyrighted "c1993.".
- 93070053 description "Includes bibliographical references and indexes.".
- 93070053 extent "xi, 628 p. :".
- 93070053 identifier "1566770645".
- 93070053 isPartOf "Proceedings (Electrochemical Society) ; v. 93-6.".
- 93070053 isPartOf "Proceedings ; v. 93-6".
- 93070053 issued "1993".
- 93070053 issued "c1993.".
- 93070053 language "eng".
- 93070053 publisher "Pennington, NJ : Electrochemical Society,".
- 93070053 subject "621.3815/2 20".
- 93070053 subject "Semiconductors Congresses.".
- 93070053 subject "Semiconductors Mathematical models Congresses.".
- 93070053 subject "TK7871.85 .I5835 1993".
- 93070053 title "Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology / edited by G.R. Srinivasan, K. Taniguchi, C.S. Murthy.".
- 93070053 type "text".