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- 93070066 contributor B6949299.
- 93070066 contributor B6949300.
- 93070066 contributor B6949301.
- 93070066 created "c1993.".
- 93070066 date "1993".
- 93070066 date "c1993.".
- 93070066 dateCopyrighted "c1993.".
- 93070066 description "Includes bibliographical references and index.".
- 93070066 extent "vii, 306 p. :".
- 93070066 identifier "1566770637".
- 93070066 isPartOf "Proceedings (Electrochemical Society) ; v. 93-13.".
- 93070066 isPartOf "Proceedings ; v. 93-13".
- 93070066 issued "1993".
- 93070066 issued "c1993.".
- 93070066 language "eng".
- 93070066 publisher "Pennington, NJ : Electrochemical Society,".
- 93070066 subject "621.39/5 20".
- 93070066 subject "Integrated circuits Ultra large scale integration Congresses.".
- 93070066 subject "TK7874.76 .I58 1993".
- 93070066 title "ULSI science and technology, 1993 : proceedings of the Fourth International Symposium on Ultra Large Scale Integration Science and Technology / edited by George K. Celler, Ed Middlesworth, Koichiro Hoh ; assistant editors, Wayne Bailey ... [et al.].".
- 93070066 type "text".