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- 93070068 contributor B6949302.
- 93070068 contributor B6949303.
- 93070068 contributor B6949304.
- 93070068 created "c1993.".
- 93070068 date "1993".
- 93070068 date "c1993.".
- 93070068 dateCopyrighted "c1993.".
- 93070068 description "Includes bibliographical references and indexes.".
- 93070068 extent "x, 438 p. :".
- 93070068 identifier "1566770661".
- 93070068 isPartOf "Proceedings (Electrochemical Society) ; v. 93-21.".
- 93070068 isPartOf "Proceedings ; v. 93-21".
- 93070068 issued "1993".
- 93070068 issued "c1993.".
- 93070068 language "eng".
- 93070068 publisher "Pennington, NJ : Electrochemical Society,".
- 93070068 subject "621.3815/31 20".
- 93070068 subject "Plasma etching Congresses.".
- 93070068 subject "Semiconductors Etching Congresses.".
- 93070068 subject "TK7871.85 .S956 1993".
- 93070068 title "Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control / edited by G.S. Mathad, Y. Horiike.".
- 93070068 type "text".