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- 93072861 contributor B6951760.
- 93072861 contributor B6951761.
- 93072861 contributor B6951762.
- 93072861 created "c1993.".
- 93072861 date "1993".
- 93072861 date "c1993.".
- 93072861 dateCopyrighted "c1993.".
- 93072861 description "Includes bibliographical references and indexes.".
- 93072861 extent "ix, 283 p. :".
- 93072861 identifier "1566770599".
- 93072861 isPartOf "Proceedings (Electrochemical Society) ; v. 93-15.".
- 93072861 isPartOf "Proceedings ; v. 93-15".
- 93072861 issued "1993".
- 93072861 issued "c1993.".
- 93072861 language "eng".
- 93072861 publisher "Pennington, NJ : Electrochemical Society,".
- 93072861 subject "621.39/5 20".
- 93072861 subject "Crystals Defects Congresses.".
- 93072861 subject "Integrated circuits Very large scale integration Congresses.".
- 93072861 subject "TK7874.75 C79 1993".
- 93072861 title "Crystalline defects and contamination : their impact and control in device manufacturing : proceedings of the Satellite Symposium to ESSDERC 93, Grenoble, France / edited by Bernd O. Kolbesen ... [et al.].".
- 93072861 type "text".