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- 93084681 contributor B6958919.
- 93084681 contributor B6958920.
- 93084681 created "c1994.".
- 93084681 date "1994".
- 93084681 date "c1994.".
- 93084681 dateCopyrighted "c1994.".
- 93084681 description "Includes bibliographical references and index.".
- 93084681 extent "xiii, 592 p. :".
- 93084681 identifier "0819412600".
- 93084681 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 2011".
- 93084681 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 1546.".
- 93084681 issued "1994".
- 93084681 issued "c1994.".
- 93084681 language "eng".
- 93084681 publisher "Bellingham, Wash. : The Society,".
- 93084681 subject "621.36 20".
- 93084681 subject "Extreme ultraviolet lithography Congresses.".
- 93084681 subject "Grazing incidence Congresses.".
- 93084681 subject "Mirrors Design and construction Congresses.".
- 93084681 subject "QB472.A1 N85 1994".
- 93084681 subject "Ultraviolet astronomy Congresses.".
- 93084681 subject "X-ray astronomy Congresses.".
- 93084681 subject "X-ray lithography Congresses.".
- 93084681 subject "X-ray optics Congresses.".
- 93084681 title "Multilayer and grazing incidence X-ray/EUV optics II : 14-16 July 1993, San Diego, California / Richard B. Hoover, Arthur B.C. Walker, Jr., chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 93084681 type "text".