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- 93118373 alternative "3rd International Conference on micro, electro, opto, mechanic systems and components.".
- 93118373 alternative "Third International Conference on micro, electro, opto, mechanic systems and components.".
- 93118373 contributor B6981936.
- 93118373 contributor B6981937.
- 93118373 created "c1992.".
- 93118373 date "1992".
- 93118373 date "c1992.".
- 93118373 dateCopyrighted "c1992.".
- 93118373 description "Includes bibliographical references and index.".
- 93118373 extent "534 p. :".
- 93118373 identifier "3800718944".
- 93118373 issued "1992".
- 93118373 issued "c1992.".
- 93118373 language "eng".
- 93118373 publisher "Berlin : vde-Verlag,".
- 93118373 subject "621.381 20".
- 93118373 subject "Electronic circuit design Data processing Congresses.".
- 93118373 subject "Electronic packaging Congresses.".
- 93118373 subject "High technology Congresses.".
- 93118373 subject "Microelectronics Congresses.".
- 93118373 subject "Microelectronics Materials Congresses.".
- 93118373 subject "TK7874 .I472 1992".
- 93118373 title "Micro system technologies 92 / 3rd International Conference on Micro, Electro, Opto, Mechanic Systems and Components, Berlin, October 21-23, 1992 ; Herbert Reichl, Editor.".
- 93118373 type "text".