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- 94009632 contributor B7168428.
- 94009632 contributor B7168429.
- 94009632 created "c1994.".
- 94009632 date "1994".
- 94009632 date "c1994.".
- 94009632 dateCopyrighted "c1994.".
- 94009632 description "Includes bibliographical references and indexes.".
- 94009632 extent "xv, 556 p. :".
- 94009632 identifier "1558992332".
- 94009632 isPartOf "Materials Research Society symposia proceedings ; v. 334.".
- 94009632 isPartOf "Materials Research Society symposium proceedings ; v. 334".
- 94009632 issued "1994".
- 94009632 issued "c1994.".
- 94009632 language "eng".
- 94009632 publisher "Pittsburgh, Pa. : Materials Research Society,".
- 94009632 subject "621.3815/2 20".
- 94009632 subject "Electronics Materials Surfaces Congresses.".
- 94009632 subject "Surface chemistry Congresses.".
- 94009632 subject "TK7871 .G37 1994".
- 94009632 title "Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A. / editors, T.J. Mountziaris ... [et al.].".
- 94009632 type "text".