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- 94010205 contributor B7169116.
- 94010205 contributor B7169115.
- 94010205 created "1994.".
- 94010205 date "1994".
- 94010205 date "1994.".
- 94010205 dateCopyrighted "1994.".
- 94010205 description "Includes bibliographical references and indexes.".
- 94010205 extent "xii, 215 p. :".
- 94010205 identifier "0792327942 (acid-free paper)".
- 94010205 identifier 94010205-d.html.
- 94010205 identifier 94010205-t.html.
- 94010205 isPartOf "NATO ASI series. Series E, Applied sciences ; no. 264".
- 94010205 issued "1994".
- 94010205 issued "1994.".
- 94010205 language "eng".
- 94010205 publisher "Dordrecht ; Boston : Kluwer Academic Publishers,".
- 94010205 subject "621.3815/31 20".
- 94010205 subject "Integrated circuits Design and construction Congresses.".
- 94010205 subject "Microlithography Congresses.".
- 94010205 subject "Molecular electronics Congresses.".
- 94010205 subject "Nanolithography Congresses.".
- 94010205 subject "TK7874.8 .N37 1993".
- 94010205 title "Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies / edited by M. Gentili, C. Giovannella, and S. Selci.".
- 94010205 type "text".