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- 94017563 contributor B7177772.
- 94017563 created "c1995.".
- 94017563 date "1995".
- 94017563 date "c1995.".
- 94017563 dateCopyrighted "c1995.".
- 94017563 description "Includes bibliographical references and index.".
- 94017563 extent "x, 363 p. :".
- 94017563 identifier "0890067074".
- 94017563 isPartOf "The Artech House materials science library".
- 94017563 issued "1995".
- 94017563 issued "c1995.".
- 94017563 language "eng".
- 94017563 publisher "Boston : Artech House,".
- 94017563 subject "621.3815/2/0113 20".
- 94017563 subject "Process control Mathematical models.".
- 94017563 subject "Semiconductor industry.".
- 94017563 subject "Semiconductors Design and construction Data processing.".
- 94017563 subject "TK7871.85 .C593 1995".
- 94017563 title "Computational modeling in semiconductor processing / M. Meyyappan, editor.".
- 94017563 type "text".