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- 94065374 contributor B7217355.
- 94065374 created "c1994.".
- 94065374 date "1994".
- 94065374 date "c1994.".
- 94065374 dateCopyrighted "c1994.".
- 94065374 description "Includes bibliographical references and index.".
- 94065374 extent "ix, 146 p. ;".
- 94065374 identifier "1557523622".
- 94065374 isPartOf "Technical digest series (Optical Society of America)".
- 94065374 isPartOf "Technical digest".
- 94065374 issued "1994".
- 94065374 issued "c1994.".
- 94065374 language "eng".
- 94065374 publisher "Washington, DC : The Society,".
- 94065374 subject "621.36 21".
- 94065374 subject "Interferometry Congresses.".
- 94065374 subject "Lasers Industrial applications Congresses.".
- 94065374 subject "Optical coatings Congresses.".
- 94065374 subject "Photolithography Congresses.".
- 94065374 subject "TS517.2 .E99 1994".
- 94065374 subject "Ultraviolet radiation Industrial applications Congresses.".
- 94065374 title "Extreme ultraviolet lithography : summaries of papers presented at the topical meeting, Extreme Ultraviolet Lithography, September 19-21, 1994, Monterey, California / sponsored by Optical Society of America.".
- 94065374 type "text".