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- 94065375 alternative "Extreme ultraviolet lithography.".
- 94065375 contributor B7217356.
- 94065375 contributor B7217357.
- 94065375 created "c1995.".
- 94065375 date "1995".
- 94065375 date "c1995.".
- 94065375 dateCopyrighted "c1995.".
- 94065375 description "Includes bibliographical references and index.".
- 94065375 extent "xi, 283 p. :".
- 94065375 identifier "1557523630".
- 94065375 issued "1995".
- 94065375 issued "c1995.".
- 94065375 language "eng".
- 94065375 publisher "Washington, DC : The Society,".
- 94065375 subject "Interferometry Congresses.".
- 94065375 subject "Lasers Industrial applications Congresses.".
- 94065375 subject "Optical coatings Congresses.".
- 94065375 subject "Photolithography Congresses.".
- 94065375 subject "TS517.2 .O83 1995".
- 94065375 subject "Ultraviolet radiation Industrial applications Congresses.".
- 94065375 title "Extreme ultraviolet lithography.".
- 94065375 title "OSA proceedings on extreme ultraviolet lithography : proceedings of the topical meeting, September 19-21, 1994, Monterey, California / edited by Frits Zernike and David T. Attwood ; sponsored by Optical Society of America.".
- 94065375 type "text".