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- 94067248 alternative "Fourteenth Annual Symposium on Photomask Technology and Management".
- 94067248 contributor B7218973.
- 94067248 contributor B7218974.
- 94067248 contributor B7218975.
- 94067248 created "c1994.".
- 94067248 date "1994".
- 94067248 date "c1994.".
- 94067248 dateCopyrighted "c1994.".
- 94067248 description "Includes bibliographical references and index.".
- 94067248 extent "vii, 454 p. :".
- 94067248 identifier "0819416533".
- 94067248 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2322.".
- 94067248 isPartOf "SPIE proceedings series ; v. 2322".
- 94067248 issued "1994".
- 94067248 issued "c1994.".
- 94067248 language "eng".
- 94067248 publisher "Bellingham, Wash., USA : SPIE,".
- 94067248 subject "621.3815/31 20".
- 94067248 subject "Integrated circuits Masks Congresses.".
- 94067248 subject "Microlithography Congresses.".
- 94067248 subject "TK7872.M3 S96 1994".
- 94067248 title "14th annual Symposium on Photomask Technology and Management : proceedings : 14-16 September 1994, Santa Clara, California / William L. Brodsky, Gilbert V. Sheldon, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology.".
- 94067248 title "Fourteenth Annual Symposium on Photomask Technology and Management".
- 94067248 type "text".