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- 94067260 contributor B7218991.
- 94067260 contributor B7218992.
- 94067260 created "c1994.".
- 94067260 date "1994".
- 94067260 date "c1994.".
- 94067260 dateCopyrighted "c1994.".
- 94067260 description "Includes bibliographical references and index.".
- 94067260 extent "ix, 348 p. :".
- 94067260 identifier "0819416673".
- 94067260 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 2334".
- 94067260 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2334.".
- 94067260 issued "1994".
- 94067260 issued "c1994.".
- 94067260 language "eng".
- 94067260 publisher "Bellingham, Wash., USA : SPIE,".
- 94067260 subject "Integrated circuits Design and construction Congresses.".
- 94067260 subject "Integrated circuits Reliability Congresses.".
- 94067260 subject "TK7874 .M4837 1994".
- 94067260 title "Microelectronics manufacturability, yield, and reliability : 20-21 October 1994, Austin, Texas / Barbara Vasquez, Hisao Kawasaki, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 94067260 type "text".