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- 94067261 contributor B7218993.
- 94067261 contributor B7218994.
- 94067261 created "c1994.".
- 94067261 date "1994".
- 94067261 date "c1994.".
- 94067261 dateCopyrighted "c1994.".
- 94067261 description "Includes bibliographical references and author index.".
- 94067261 extent "ix, 290 p. :".
- 94067261 identifier "0819416681 (pbk.)".
- 94067261 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 2335".
- 94067261 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2335.".
- 94067261 issued "1994".
- 94067261 issued "c1994.".
- 94067261 language "eng".
- 94067261 publisher "Bellingham, Wash., USA : SPIE,".
- 94067261 subject "Dielectric films Congresses.".
- 94067261 subject "Integrated circuits Design and construction Congresses.".
- 94067261 subject "Metallizing Congresses.".
- 94067261 subject "Plasma etching Congresses.".
- 94067261 subject "TK7874 .M4874 1994".
- 94067261 title "Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas / Fusen E. Chen, Shyam P. Murarka, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 94067261 type "text".