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- 94067262 contributor B7218995.
- 94067262 contributor B7218996.
- 94067262 created "c1994.".
- 94067262 date "1994".
- 94067262 date "c1994.".
- 94067262 dateCopyrighted "c1994.".
- 94067262 description "Includes bibliographical references and index.".
- 94067262 extent "ix, 250 p. :".
- 94067262 identifier "081941669X (pbk.)".
- 94067262 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 2336".
- 94067262 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2336.".
- 94067262 issued "1994".
- 94067262 issued "c1994.".
- 94067262 language "eng".
- 94067262 publisher "Bellingham, Wash. : SPIE,".
- 94067262 subject "621.3815 20".
- 94067262 subject "Integrated circuits Design and construction Congresses.".
- 94067262 subject "Integrated circuits Very large scale integration Design and construction Congresses.".
- 94067262 subject "Process control Congresses.".
- 94067262 subject "TK7874 .M2577 1994".
- 94067262 title "Manufacturing process control for microelectronic devices and circuits : 20-21 October 1994, Austin, Texas / Anant G. Sabnis, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 94067262 type "text".