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- 94067263 contributor B7218997.
- 94067263 contributor B7218998.
- 94067263 created "c1994.".
- 94067263 date "1994".
- 94067263 date "c1994.".
- 94067263 dateCopyrighted "c1994.".
- 94067263 description "Includes bibliographical references and author index.".
- 94067263 extent "vii, 202 p. :".
- 94067263 identifier "0819416703 (pbk.)".
- 94067263 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 2337".
- 94067263 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2337.".
- 94067263 issued "1994".
- 94067263 issued "c1994.".
- 94067263 language "eng".
- 94067263 publisher "Bellingham, Wash., USA : SPIE,".
- 94067263 subject "621.3815/2/0287 20".
- 94067263 subject "Integrated circuits Design and construction Congresses.".
- 94067263 subject "Integrated circuits Testing Optical methods Congresses.".
- 94067263 subject "Optical pattern recognition Congresses.".
- 94067263 subject "Semiconductors Design and construction Congresses.".
- 94067263 subject "Semiconductors Testing Optical methods Congresses.".
- 94067263 subject "TK7871.85 .O595 1994".
- 94067263 title "Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas / Jagdish P. Mathur, John Lowell, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 94067263 type "text".