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- 94069222 contributor B7220619.
- 94069222 contributor B7220620.
- 94069222 created "c1994.".
- 94069222 date "1994".
- 94069222 date "c1994.".
- 94069222 dateCopyrighted "c1994.".
- 94069222 description "Includes bibliographical references and index.".
- 94069222 extent "xvi, 268 p. :".
- 94069222 identifier "0819412406".
- 94069222 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 1991".
- 94069222 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 1991.".
- 94069222 issued "1994".
- 94069222 issued "c1994.".
- 94069222 language "eng".
- 94069222 publisher "Bellingham, Wash., USA : SPIE,".
- 94069222 subject "535/.4 20".
- 94069222 subject "Diffraction Congresses.".
- 94069222 subject "Optical instruments Design and construction Congresses.".
- 94069222 subject "QC414.8 .D55 1994".
- 94069222 title "Diffractometry and scatterometry : 24-28 May 1993, Warsaw, Poland / Maksymilian Pluta, Mariusz Szyjer, chairs/editors ; organized by SPIE Poland Chapter [and] Institute of Applied Optics, Warsaw ; sponsored by SPIE--the International Society for Optical Engineering [and] State Committee for Scientific Research (Poland).".
- 94069222 type "text".