Matches in Library of Congress for { <http://lccn.loc.gov/94069902> ?p ?o. }
Showing items 1 to 24 of
24
with 100 items per page.
- 94069902 contributor B7221181.
- 94069902 contributor B7221182.
- 94069902 created "c1995.".
- 94069902 date "1995".
- 94069902 date "c1995.".
- 94069902 dateCopyrighted "c1995.".
- 94069902 description "Includes bibliographical references and author index.".
- 94069902 extent "xi, 514 p. :".
- 94069902 identifier "0819417874 (pbk.)".
- 94069902 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 2439".
- 94069902 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2439.".
- 94069902 issued "1995".
- 94069902 issued "c1995.".
- 94069902 language "eng".
- 94069902 publisher "Bellingham, Wash., USA : SPIE,".
- 94069902 subject "621.3815/31 20".
- 94069902 subject "Integrated circuits Inspection Congresses.".
- 94069902 subject "Integrated circuits Measurement Congresses.".
- 94069902 subject "Optical measurements Congresses.".
- 94069902 subject "Process control Congresses.".
- 94069902 subject "Scanning electron microscopes Congresses.".
- 94069902 subject "TK7874 .I4714 1995".
- 94069902 title "Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California / Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International.".
- 94069902 type "text".