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- 94070841 alternative "Contamination control and defect reduction in semiconductor manufacturing III.".
- 94070841 contributor B7221995.
- 94070841 contributor B7221996.
- 94070841 contributor B7221997.
- 94070841 created "c1994.".
- 94070841 date "1994".
- 94070841 date "c1994.".
- 94070841 dateCopyrighted "c1994.".
- 94070841 description "Includes bibliographical references and indexes.".
- 94070841 extent "ix, 433 p. :".
- 94070841 identifier "1566770416".
- 94070841 isPartOf "Proceedings (Electrochemical Society) ; v. 94-9.".
- 94070841 isPartOf "Proceedings ; v. 94-9".
- 94070841 issued "1994".
- 94070841 issued "c1994.".
- 94070841 language "eng".
- 94070841 publisher "Pennington, NJ : Electrochemical Society,".
- 94070841 subject "Semiconductors Defects Congresses.".
- 94070841 subject "Semiconductors Design and construction Congresses.".
- 94070841 subject "TK7871.85 .S9537 1994".
- 94070841 title "Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III / editor, Dennis N. Schmidt ... [et al.].".
- 94070841 type "text".