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- 94070846 alternative "Microstructures and microfabricated systems.".
- 94070846 contributor B7222004.
- 94070846 contributor B7222005.
- 94070846 contributor B7222006.
- 94070846 created "c1994.".
- 94070846 date "1994".
- 94070846 date "c1994.".
- 94070846 dateCopyrighted "c1994.".
- 94070846 description "Includes bibliographical references and indexes.".
- 94070846 extent "viii, 255 p. :".
- 94070846 identifier "1566770467".
- 94070846 isPartOf "Proceedings (Electrochemical Society) ; v. 94-14.".
- 94070846 isPartOf "Proceedings ; v. 94-14".
- 94070846 issued "1994".
- 94070846 issued "c1994.".
- 94070846 language "eng".
- 94070846 publisher "Pennington, NJ : Electrochemical Society,".
- 94070846 subject "681/.2 20".
- 94070846 subject "Microelectronics Congresses.".
- 94070846 subject "Micromechanics Congresses.".
- 94070846 subject "Microstructure Congresses.".
- 94070846 subject "TK7874 .S9374 1994".
- 94070846 title "Proceedings of the Symposium on Microstructures and Microfabricated Systems / edited by P.J. Hesketh, J.N. Zemel, H.G. Hughes.".
- 94070846 type "text".