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- 94175708 contributor B7308456.
- 94175708 created "1992.".
- 94175708 date "1992".
- 94175708 date "1992.".
- 94175708 dateCopyrighted "1992.".
- 94175708 description "Includes bibliographical references.".
- 94175708 extent "97 p. ;".
- 94175708 identifier "5020068683".
- 94175708 isPartOf "Trudy FTIAN, 0868-7129 ; t. 4".
- 94175708 issued "1992".
- 94175708 issued "1992.".
- 94175708 language "rus eng".
- 94175708 language "rus".
- 94175708 subject "Microelectronics.".
- 94175708 subject "TK7874 .P7393 1992".
- 94175708 title "Problemy mikroėlektronnoĭ tekhnologii / otvetstvennyĭ redaktor L.V. Velikov.".
- 94175708 type "text".