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- 94187531 contributor B7320373.
- 94187531 created "c1991.".
- 94187531 date "1991".
- 94187531 date "c1991.".
- 94187531 dateCopyrighted "c1991.".
- 94187531 description "Includes bibliographical references (108-112).".
- 94187531 extent "112 p. :".
- 94187531 identifier "3181422096".
- 94187531 isPartOf "Fortschritt-Berichte VDI. Reihe 9, Elektronik, 0178-9422 ; Nr. 122".
- 94187531 isPartOf "Fortschritt-Berichte der VDI-Zeitschriften. Reihe Elektrotechnik, Elektronik ; Nr. 122.".
- 94187531 issued "1991".
- 94187531 issued "c1991.".
- 94187531 language "ger".
- 94187531 publisher "Düsseldorf : VDI-Verlag,".
- 94187531 subject "Electronic packaging.".
- 94187531 subject "Integrated circuits Design and construction.".
- 94187531 subject "Metal oxide semiconductors, Complementary.".
- 94187531 subject "TK7871.99.M44 N54 1991".
- 94187531 title "ITM-prozessierte CoSi2-Kontakte für grossintegrierte CMOS-Schaltungen / Ludwig Niewöhner.".
- 94187531 type "text".