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- 94197010 contributor B7330646.
- 94197010 contributor B7330647.
- 94197010 created "1993.".
- 94197010 date "1993".
- 94197010 date "1993.".
- 94197010 dateCopyrighted "1993.".
- 94197010 description "Includes bibliographical references (p. 23-25)".
- 94197010 extent "iv, 211 p. :".
- 94197010 isPartOf "NIST special publication ; 400-92".
- 94197010 isPartOf "Semiconductor measurement technology".
- 94197010 issued "1993".
- 94197010 issued "1993.".
- 94197010 language "eng".
- 94197010 publisher "Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology ; Washington, DC : For sale by the Supt. of Docs., U.S. G.P.O.,".
- 94197010 subject "602/.18 s 621.3815/2 20".
- 94197010 subject "Electronics Materials Testing.".
- 94197010 subject "QC100 .U57 no. 400-92 TK7871.85".
- 94197010 subject "Semiconductor wafers Standards.".
- 94197010 subject "Silicon.".
- 94197010 title "Evolution of silicon materials characterization : lessons learned for improved manufacturing / W. Murray Bullis ; prepared for Semiconductor Electronics Division, Electronics and Electrical Engineering Laboratory, National Institute of Standards and Technology.".
- 94197010 type "text".