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- 94221920 contributor B7355956.
- 94221920 created "1993.".
- 94221920 date "1993".
- 94221920 date "1993.".
- 94221920 dateCopyrighted "1993.".
- 94221920 description "Includes bibliographical references.".
- 94221920 extent "111 p. :".
- 94221920 identifier "5020069914".
- 94221920 isPartOf "Trudy FTIAN, 0868-7129 ; t. 6".
- 94221920 issued "1993".
- 94221920 issued "1993.".
- 94221920 language "rus eng".
- 94221920 language "rus".
- 94221920 subject "Integrated circuits Design and construction.".
- 94221920 subject "Plasma engineering.".
- 94221920 subject "TK7874 .P7395 1993".
- 94221920 title "Problemy submikronnoĭ tekhnologii / otvetstvennyĭ redaktor A.A. Orlikovskiĭ.".
- 94221920 type "text".