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- 95012433 contributor B7457541.
- 95012433 created "c1995.".
- 95012433 date "1995".
- 95012433 date "c1995.".
- 95012433 dateCopyrighted "c1995.".
- 95012433 description "Includes bibliographical references and index.".
- 95012433 extent "xi, 324 p. :".
- 95012433 identifier "012137940X (alk. paper)".
- 95012433 identifier 95012433.html.
- 95012433 identifier 95012433.html.
- 95012433 isPartOf "Plasma--materials interactions".
- 95012433 issued "1995".
- 95012433 issued "c1995.".
- 95012433 language "eng".
- 95012433 publisher "Boston : Academic Press,".
- 95012433 subject "621.3815/2 20".
- 95012433 subject "Amorphous semiconductors Design and construction.".
- 95012433 subject "Plasma-enhanced chemical vapor deposition.".
- 95012433 subject "Silicon alloys.".
- 95012433 subject "TK7871.99.A45 P55 1995".
- 95012433 title "Plasma deposition of amorphous silicon-based materials / edited by Giovanni Bruno, Pio Capezzuto, Arun Madan.".
- 95012433 type "text".