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- 95031842 contributor B7476706.
- 95031842 created "c1995.".
- 95031842 date "1995".
- 95031842 date "c1995.".
- 95031842 dateCopyrighted "c1995.".
- 95031842 description "Includes bibliographical references and indexes.".
- 95031842 extent "xiii, 411 p. :".
- 95031842 identifier "1558992898 (alk. paper)".
- 95031842 isPartOf "Materials Research Society symposia proceedings ; v. 386.".
- 95031842 isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 386".
- 95031842 issued "1995".
- 95031842 issued "c1995.".
- 95031842 language "eng".
- 95031842 publisher "Pittsburgh, Pa. : Materials Research Society,".
- 95031842 subject "621.3815/2 20".
- 95031842 subject "Integrated circuits Design and construction Congresses.".
- 95031842 subject "Manufacturing processes Congresses.".
- 95031842 subject "Semiconductors Cleaning Congresses.".
- 95031842 subject "Surface preparation Congresses.".
- 95031842 subject "TK7874 .U373 1995".
- 95031842 title "Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : symposium held April 17-19, 1995, San Francisco, California, U.S.A. / editors, Michael Liehr ... [et al.].".
- 95031842 type "text".