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- 95040381 contributor B7486780.
- 95040381 contributor B7486781.
- 95040381 created "c1995.".
- 95040381 date "1995".
- 95040381 date "c1995.".
- 95040381 dateCopyrighted "c1995.".
- 95040381 description "Includes bibliographical references and index.".
- 95040381 extent "xix, 468 p. :".
- 95040381 identifier "0792396197 (alk. paper)".
- 95040381 identifier 95040381-d.html.
- 95040381 identifier 95040381-t.html.
- 95040381 isPartOf "Kluwer international series in engineering and computer science ; SECS 339.".
- 95040381 isPartOf "Kluwer international series in engineering and computer science. Microelectronics manufacturing.".
- 95040381 isPartOf "The Kluwer international series in engineering and computer science ; SECS 339. Microelectronics manufacturing".
- 95040381 issued "1995".
- 95040381 issued "c1995.".
- 95040381 language "eng".
- 95040381 publisher "Boston : Kluwer Academic Publishers,".
- 95040381 subject "621.3815/2 20".
- 95040381 subject "Factory management.".
- 95040381 subject "Semiconductor wafers Design and construction.".
- 95040381 subject "TK7871.85 .A844 1995".
- 95040381 title "Wafer fabrication : factory performance and analysis / Linda F. Atherton, Robert W. Atherton.".
- 95040381 type "text".