Matches in Library of Congress for { <http://lccn.loc.gov/95067866> ?p ?o. }
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- 95067866 contributor B7504848.
- 95067866 contributor B7504849.
- 95067866 created "c1995.".
- 95067866 date "1995".
- 95067866 date "c1995.".
- 95067866 dateCopyrighted "c1995.".
- 95067866 description "Includes bibliographic references and author index.".
- 95067866 extent "xi, 554 p. :".
- 95067866 identifier "0819418706".
- 95067866 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 2512".
- 95067866 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2512.".
- 95067866 issued "1995".
- 95067866 issued "c1995.".
- 95067866 language "eng".
- 95067866 publisher "Bellingham, Wash. : SPIE,".
- 95067866 subject "621.3815/31 20".
- 95067866 subject "Integrated circuits Masks Congresses.".
- 95067866 subject "Microlithography Congresses.".
- 95067866 subject "TK7872.M3 P47 1995".
- 95067866 subject "X-ray lithography Congresses.".
- 95067866 title "Photomask and X-ray mask technology II : 20-21 April 1995, Kawasaki City, Kanagawa, Japan / Hideo Yoshihara, editor ; sponsored by Photomask Japan, BACUS, SPIE--the International Society for Optical Engineering ; cosponsored by Japan Chapter of SPIE ... [et al.].".
- 95067866 type "text".