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- 95068882 contributor B7505625.
- 95068882 contributor B7505626.
- 95068882 created "c1995.".
- 95068882 date "1995".
- 95068882 date "c1995.".
- 95068882 dateCopyrighted "c1995.".
- 95068882 description "Includes bibliographical references and index.".
- 95068882 extent "337 p. :".
- 95068882 identifier "1562523147 (Boston)".
- 95068882 identifier "1853123900 (Southampton)".
- 95068882 issued "1995".
- 95068882 issued "c1995.".
- 95068882 language "eng".
- 95068882 publisher "Southampton ; Boston : Computational Mechanics Publications,".
- 95068882 subject "Computer-aided design Congresses.".
- 95068882 subject "Masks (Electronics) Congresses.".
- 95068882 subject "Microelectronics Design Congresses.".
- 95068882 subject "Microelectronics Simulation methods Congresses.".
- 95068882 subject "Micromechanics Congresses.".
- 95068882 subject "TK7874 .I5775 1995".
- 95068882 title "Simulation and design of microsystems and microstructures / editors, R.A. Adey, A. Lahrmann, C. Lessmölmann.".
- 95068882 type "text".