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- 95069911 contributor B7506433.
- 95069911 contributor B7506434.
- 95069911 contributor B7506435.
- 95069911 created "c1995.".
- 95069911 date "1995".
- 95069911 date "c1995.".
- 95069911 dateCopyrighted "c1995.".
- 95069911 description "Includes bibliographical references and index.".
- 95069911 extent "vii, 132 p. :".
- 95069911 identifier "0819419575".
- 95069911 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 2593".
- 95069911 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2593.".
- 95069911 issued "1995".
- 95069911 issued "c1995.".
- 95069911 language "eng".
- 95069911 publisher "Bellingham, Wash., USA : SPIE,".
- 95069911 subject "629.8/92 21".
- 95069911 subject "Microelectromechanical systems Congresses.".
- 95069911 subject "Microrobots Congresses.".
- 95069911 subject "Robotics Congresses.".
- 95069911 subject "TJ210.3 .M53 1995".
- 95069911 title "Microrobotics and micromechanical systems : 25 October 1995, Philadelphia, Pennsylvania / Lynne E. Parker, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 95069911 type "text".