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- 95070374 contributor B7506761.
- 95070374 contributor B7506762.
- 95070374 created "c1995.".
- 95070374 date "1995".
- 95070374 date "c1995.".
- 95070374 dateCopyrighted "c1995.".
- 95070374 description "Includes bibliographical references and index.".
- 95070374 extent "vii, 336 p. :".
- 95070374 identifier "0819420050".
- 95070374 isPartOf "Proceedings / SPIE--the International Society of Optical Engineering ; v. 2639".
- 95070374 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2639.".
- 95070374 issued "1995".
- 95070374 issued "c1995.".
- 95070374 language "eng".
- 95070374 publisher "Bellingham, Wash. : SPIE,".
- 95070374 subject "621.3815/2 21".
- 95070374 subject "Electromechanical devices Design and construction Congresses.".
- 95070374 subject "Microfabrication Congresses.".
- 95070374 subject "Micromachining Congresses.".
- 95070374 subject "TJ1191.5 .M54 1995".
- 95070374 title "Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas / Karen W. Markus, chair/editor ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--The International Society of Optical Engineering.".
- 95070374 type "text".